Michael Dowell - "CVD of Silicon Nitride Plate from HSiCl3 - NH3 - H2 Mixtures" J.W. Lennartz and M.B. Dowell Mat. Res. Soc. Symp. Proc. 250, 161 (1992)

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  Publication Details (including relevant citation   information): "CVD of Silicon Nitride Plate from HSiCl3   - NH3 - H2 Mixtures" J.W. Lennartz and M.B. Dowell Mat. Res. Soc.   Symp. Proc. 250, 161 (1992)

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