Andrew Feiring - "The impact of fluoropolymers on line edge roughness in 193 nm imaging", Zumsteg, F. C.; Leffew, K. W.; Feiring, A. E.; Crawford, M. K.; Farnham, W. B

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  Publication Details (including relevant citation   information): "The impact of fluoropolymers on line edge   roughness in 193 nm imaging", Zumsteg, F. C.; Leffew, K. W.;   Feiring, A. E.; Crawford, M. K.; Farnham, W. B.; Petrov, V. A.;   Schadt, F. L., III; Tran, H. V. J. Photopolymer Sci. Technology   2005, 18, 467.

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