James Hanson - "Synthesis and Evaluation of Copolymers of 4-t-Butoxycarbonyloxystyrene and 2-Nitro-benzylstyrene Sulfonates: Single Component Chemically Amplified Deep UV Imaging Materials" J

Document created by James Hanson on Aug 22, 2014
Version 1Show Document
  • View in full screen mode

  Publication Details (including relevant citation   information): "Synthesis and Evaluation of Copolymers of   4-t-Butoxycarbonyloxystyrene and 2-Nitro-benzylstyrene   Sulfonates: Single Component Chemically Amplified Deep UV Imaging   Materials" J.E. Hanson, E. Reichmanis, F.M. Houlihan, T.X. Neenan   Chemistry of Materials , 1992, 4, 837-842.

  Abstract: null

  Address (URL):

 

Attachments

    Outcomes