Lee Loewenstein - "Temperature Dependence of Silicon Nitride Etching by Atomic Fluorine," L.M. Loewenstein, J. Appl. Phys. 65, 386 (1989).

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  Publication Details (including relevant citation   information): "Temperature Dependence of Silicon Nitride   Etching by Atomic Fluorine," L.M. Loewenstein, J. Appl. Phys. 65,   386 (1989).

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