Guy Hudson - G.F. Hudson, "Effect of Oxide and Titanium Anneals on Oxide Removed during Metal CMP," CMP-MIC Proceedings (VMIC), February, 1996, pp. 132-137.

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  Publication Details (including relevant citation   information): G.F. Hudson, "Effect of Oxide and Titanium   Anneals on Oxide Removed during Metal CMP," CMP-MIC Proceedings   (VMIC), February, 1996, pp. 132-137.

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