Guy Hudson - G.F. Hudson and R.L. Elliott, "Barrier Metalization Effects During Tungsten CMP," VMIC Proceedings, June, 1995, pp. 514-516.

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  Publication Details (including relevant citation   information): G.F. Hudson and R.L. Elliott, "Barrier   Metalization Effects During Tungsten CMP," VMIC Proceedings,   June, 1995, pp. 514-516.

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