Lee Loewenstein - "On-Line Diagnostic Monitoring of Photoresist Ashing," J.A. Stefani, L.M. Loewenstein and M. Sullivan, IEEE Trans. Semicond. Manuf.  8, 2-9 (1995).

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  Publication Details (including relevant citation   information): "On-Line Diagnostic Monitoring of   Photoresist Ashing," J.A. Stefani, L.M. Loewenstein and M.   Sullivan, IEEE Trans. Semicond. Manuf. 8, 2-9 (1995).

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