Lee Loewenstein - L.M. Loewenstein, C.J. Davis, Remote Plasma Generation Process Using a Two-Stage Showerhead, U.S. Patent 4,904,621, Feb. 27, 1990.

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  Publication Details (including relevant citation   information): L.M. Loewenstein, C.J. Davis, Remote   Plasma Generation Process Using a Two-Stage Showerhead, U.S.   Patent 4,904,621, Feb. 27, 1990.

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