Lee Loewenstein - L.M. Loewenstein, C.J. Davis, Remote Plasma Generation Process Using a Two-Stage Showerhead, U.S. Patent 4,904,621, Feb. 27, 1990.

Version 1

      Publication Details (including relevant citation   information): L.M. Loewenstein, C.J. Davis, Remote   Plasma Generation Process Using a Two-Stage Showerhead, U.S.   Patent 4,904,621, Feb. 27, 1990.

      Abstract: null

      Address (URL):