Lee Loewenstein - "Chemical Etching of Thermally Oxidized Silicon Nitride: Comparison of Wet and Dry Etching Methods," L.M. Loewenstein and C.M. Tipton, J. Electrochem. Soc

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  Publication Details (including relevant citation   information): "Chemical Etching of Thermally Oxidized   Silicon Nitride: Comparison of Wet and Dry Etching Methods," L.M.   Loewenstein and C.M. Tipton, J. Electrochem. Soc. 138, 1389   (1991).

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