Lee Loewenstein - "First-Wafer Effect in Remote Microwave Plasma Stripping of Photoresist, Silicon Nitride and Polysilicon," L.M. Loewenstein, J.A. Stefani and S. Watts Butler, J

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  Publication Details (including relevant citation   information): "First-Wafer Effect in Remote Microwave   Plasma Stripping of Photoresist, Silicon Nitride and   Polysilicon," L.M. Loewenstein, J.A. Stefani and S. Watts Butler,   J. Vac. Sci. Technol. 12, 2810 (1994).

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