Lee Loewenstein - L.M. Loewenstein, Isotropic Polysilicon Plus Nitride Stripping, U.S. Patent 6,110,838, Aug. 29, 2000.

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  Publication Details (including relevant citation   information): L.M. Loewenstein, Isotropic Polysilicon   Plus Nitride Stripping, U.S. Patent 6,110,838, Aug. 29, 2000.

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