Lee Loewenstein - "The Interaction of Ion Implantation with Remote Plasma Photoresist Ashing:  A Statistical Experimental Design Study," J.A. Stefani, L.M. Loewenstein, and C

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  Publication Details (including relevant citation   information): "The Interaction of Ion Implantation with   Remote Plasma Photoresist Ashing: A Statistical Experimental   Design Study," J.A. Stefani, L.M. Loewenstein, and C. Michael, J.   Vac. Sci. Technol. A 9, 957 (1991).

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