Lee Loewenstein - "The IMEC Clean: Implementation in Advanced CMOS Manufacturing," M. Meuris, S. Arnauts, I. Cornelissen, K. Kenis, M. Lux, S. De Gendt, P.W. Mertens, I

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  Publication Details (including relevant citation   information): "The IMEC Clean: Implementation in   Advanced CMOS Manufacturing," M. Meuris, S. Arnauts, I.   Cornelissen, K. Kenis, M. Lux, S. De Gendt, P.W. Mertens, I.   Teerlinck, R. Vos, L.M. Loewenstein, and M. Heyns, Semiconductor   Fabtech 11, 295-9 (2000).

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