Lee Loewenstein - W.W. Dostalik and L.M. Loewenstein, Wafer Clamping Method, U.S. Patent 5,268,067, Dec. 7, 1993.

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  Publication Details (including relevant citation   information): W.W. Dostalik and L.M. Loewenstein, Wafer   Clamping Method, U.S. Patent 5,268,067, Dec. 7, 1993.

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