Lee Loewenstein - "MMST Wafer Cleaning," R.A. Bowling, S.C. O'Brien, L.M. Loewenstein, M.H. Bennett, and B.K. Bohannon, Solid State Technology 37, no. 1, 61 (1994).

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  Publication Details (including relevant citation   information): "MMST Wafer Cleaning," R.A. Bowling, S.C.   O'Brien, L.M. Loewenstein, M.H. Bennett, and B.K. Bohannon, Solid   State Technology 37, no. 1, 61 (1994).

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