Lee Loewenstein - "Dry Etch Processes in the MMST Flow," G. Barna, L.M. Loewenstein, K. Brankner, R.J. Gale, P.K. Mozumder, S. Watts Butler, J.A. Stefani, Solid State Technology 37, no

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  Publication Details (including relevant citation   information): "Dry Etch Processes in the MMST Flow," G.   Barna, L.M. Loewenstein, K. Brankner, R.J. Gale, P.K. Mozumder,   S. Watts Butler, J.A. Stefani, Solid State Technology 37, no. 1,   47 (1994).

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