Lee Loewenstein - "Sensor Integration into Plasma Etch Reactors of a Developmental Pilot Line," G. Barna, L.M. Loewenstein, K.J. Brankner, S. Watts Butler, P.K. Mozumder, J

Version 1

      Publication Details (including relevant citation   information): "Sensor Integration into Plasma Etch   Reactors of a Developmental Pilot Line," G. Barna, L.M.   Loewenstein, K.J. Brankner, S. Watts Butler, P.K. Mozumder, J.A.   Stefani, S.A. Henck, P. Chapados, D. Buck, S. Maung, S. Saxena   and A. Unruh, J. Vac. Sci. Technol. 12, 2860 (1994).

      Abstract: null

      Address (URL):