Publication Details (including relevant citation information): "Sensor Integration into Plasma Etch Reactors of a Developmental Pilot Line," G. Barna, L.M. Loewenstein, K.J. Brankner, S. Watts Butler, P.K. Mozumder, J.A. Stefani, S.A. Henck, P. Chapados, D. Buck, S. Maung, S. Saxena and A. Unruh, J. Vac. Sci. Technol. 12, 2860 (1994).