Lee Loewenstein - "Sensor Integration into Plasma Etch Reactors of a Developmental Pilot Line," G. Barna, L.M. Loewenstein, K.J. Brankner, S. Watts Butler, P.K. Mozumder, J

Document created by Lee Loewenstein on Aug 22, 2014
Version 1Show Document
  • View in full screen mode

  Publication Details (including relevant citation   information): "Sensor Integration into Plasma Etch   Reactors of a Developmental Pilot Line," G. Barna, L.M.   Loewenstein, K.J. Brankner, S. Watts Butler, P.K. Mozumder, J.A.   Stefani, S.A. Henck, P. Chapados, D. Buck, S. Maung, S. Saxena   and A. Unruh, J. Vac. Sci. Technol. 12, 2860 (1994).

  Abstract: null

  Address (URL):

 

Attachments

    Outcomes