Lee Loewenstein - "Cost-Effective Cleaning and High-Quality Thin Gate Oxides," M.M. Heyns, T. Bearda, I. Cornelissen, S. De Gendt, R. Degraeve, G. Groeseneken, C. Kenens, D

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      Publication Details (including relevant citation   information): "Cost-Effective Cleaning and High-Quality   Thin Gate Oxides," M.M. Heyns, T. Bearda, I. Cornelissen, S. De   Gendt, R. Degraeve, G. Groeseneken, C. Kenens, D.M. Knotter, L.M.   Loewenstein, P.W. Mertens, S. Mertens, M. Meuris, T. Nigam, M.   Schaekers, I. Teerlinck, W. Vandervorst, R. Vos and K. Wolke, IBM   J. Res. and Devel. 43, 339-50 (1999).

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