Lee Loewenstein - "Implementation of the IMEC-Cleaning in Advanced CMOS Manufacturing", M. Meuris, S. Arnauts, I. Cornelissen, K. Kenis, M. Lux, S. De Gendt, P.W. Mertens, I

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  Publication Details (including relevant citation   information): "Implementation of the IMEC-Cleaning in   Advanced CMOS Manufacturing", M. Meuris, S. Arnauts, I.   Cornelissen, K. Kenis, M. Lux, S. De Gendt, P.W. Mertens, I.   Teerlinck, R. Vos, L.M. Loewenstein, M. Heyns, K. Wolke,   Particles on Surfaces 7: Detection, Adhesion and Removal, 57-67   (2002).

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