Lee Loewenstein - "Method for Semiconductor Process Optimization Using Functional Representations of Spatial Variations and Selectivity," P.K. Mozumder and L.M. Loewenstein, IEEE Trans

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  Publication Details (including relevant citation   information): "Method for Semiconductor Process   Optimization Using Functional Representations of Spatial   Variations and Selectivity," P.K. Mozumder and L.M. Loewenstein,   IEEE Trans. Comp., Hybrids, Manuf. Technol. 15, 311 (1992).

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