Lee Loewenstein - L.M. Loewenstein, Process for Etching Silicon Nitride Selectively to Silicon Oxide, U.S. Patent 4,820,378, Apr. 11, 1989.

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  Publication Details (including relevant citation   information): L.M. Loewenstein, Process for Etching   Silicon Nitride Selectively to Silicon Oxide, U.S. Patent   4,820,378, Apr. 11, 1989.

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