Lee Loewenstein - "High-Speed Spectral Ellipsometry for In Situ Diagnostics and Process Control," W.M. Duncan, S.A. Henck, J.W. Kuehne, L.M. Loewenstein and S. Maung, J

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  Publication Details (including relevant citation   information): "High-Speed Spectral Ellipsometry for In   Situ Diagnostics and Process Control," W.M. Duncan, S.A. Henck,   J.W. Kuehne, L.M. Loewenstein and S. Maung, J. Vac. Sci. Technol.   12, 2779 (1994).

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