Lee Loewenstein - "Advanced Cleaning for the Growth of Ultrathin Gate Oxide," P.W. Mertens, T. Bearda, M. Houssa; L.M. Loewenstein, I. Cornelissen, S. De Gendt, K. Kenis, I

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  Publication Details (including relevant citation   information): "Advanced Cleaning for the Growth of   Ultrathin Gate Oxide," P.W. Mertens, T. Bearda, M. Houssa; L.M.   Loewenstein, I. Cornelissen, S. De Gendt, K. Kenis, I. Teerlinck,   R. Vos, M. Meuris, and M. Heyns, Microelectronic Engineering 48,   199-206 (1999).

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