Lee Loewenstein - K.A. Joyner and L.M. Loewenstein, Trench Isolation of a CMOS Structure, U.S. Patent 6,114,741, Sept. 5, 2000.

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  Publication Details (including relevant citation   information): K.A. Joyner and L.M. Loewenstein, Trench   Isolation of a CMOS Structure, U.S. Patent 6,114,741, Sept. 5,   2000.

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