Lee Loewenstein - "MMST Manufacturing Technology - Hardware, Sensors and Processes," G. Barna, L.M. Loewenstein, R. Robbins, S. O'Brien, A. Lane, D.D. White, M. Hanratty, J

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  Publication Details (including relevant citation   information): "MMST Manufacturing Technology - Hardware,   Sensors and Processes," G. Barna, L.M. Loewenstein, R. Robbins,   S. O'Brien, A. Lane, D.D. White, M. Hanratty, J. Hosch, G.B.   Shinn, K. Taylor and K. Brankner, IEEE Trans. Semicond. Manuf. 7,   149 (1994).

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