Lee Loewenstein - "Advanced Cleaning Strategies for Ultra-Clean Silicon Surfaces", M. Heyns, T. Bearda, I. Cornelissen, S. De Gendt, L.M. Loewenstein, P.W. Mertens, S. Mertens, M

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  Publication Details (including relevant citation   information): "Advanced Cleaning Strategies for   Ultra-Clean Silicon Surfaces", M. Heyns, T. Bearda, I.   Cornelissen, S. De Gendt, L.M. Loewenstein, P.W. Mertens, S.   Mertens, M. Meuris, M. Schaekers, I. Teerlinck, R. Vos, K. Wolke,   Cleaning Technology in Semiconductor Device Manufacturing. Proc.   of the 6th Int. Symp., 3-16 (2000).

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