Clinton Threlfall - The Investigation of the Plasma Chemistry Environment by Quantum Mechanics for ALD Precursors" Poster presentation at UOP 2006 TCO SYMPOSIUM, Argonne National Laboratory, September 19-21, 2006

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  Publication Details (including relevant citation   information): The Investigation of the Plasma Chemistry   Environment by Quantum Mechanics for ALD Precursors" Poster   presentation at UOP 2006 TCO SYMPOSIUM, Argonne National   Laboratory, September 19-21, 2006.

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