Ronald Wake - "Low Striation Positive Diazoketone Resist Composition with Cyclic Ketone(s) and Aliphatic Alcohol As Solvent," United States Patent; 4,526,856; July 2, 1986

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      Publication Details (including relevant citation   information): "Low Striation Positive Diazoketone Resist   Composition with Cyclic Ketone(s) and Aliphatic Alcohol As   Solvent," United States Patent; 4,526,856; July 2, 1986.

      Abstract: null

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