Khun Win - Replication performance of Si-N-DLC coated Si Micro-molds in Micro-hot-embossing

Document created by Khun Win on Aug 22, 2014
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  Publication Details (including relevant citation   information):

B. Saha, E. Liu, S. B. Tor, N. W. Khun, D. E. Hardt, J. H. Chun, Journal of Micromechanics and Microengineering, 20 (2010) 045007.


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