Khun Win - Replication performance of Si-N-DLC coated Si Micro-molds in Micro-hot-embossing

Version 1

      Publication Details (including relevant citation   information):

    B. Saha, E. Liu, S. B. Tor, N. W. Khun, D. E. Hardt, J. H. Chun, Journal of Micromechanics and Microengineering, 20 (2010) 045007.

      Abstract:

      Address (URL): http://www.khunnaywin.com/p/biography.html