Hiroshi Saeki - Analysis of micro-particles in TRISTAN vacuum chambers

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  Publication Details (including relevant citation   information):

  Vacuum 43(3), 189 - 193 (1992).


  Micro-particles in the beam chamber of a TRISTAN vacuum system   were investigated from the point of view of suppressing   micro-particles trapped in the accumulation ring. Micro-particles   coming from ion pumps (IP) and distributed ion pumps (DIP),   aluminum alloy particles produced during treatment of aluminum   alloy chambers for welding, micro-particles from the environment,   i.e. soil (granite rocks or amphiboles), particles of concrete   and painting materials were identified. A molten iron particle   found in a chamber suggests interaction between the particle and   bunched electron beam. Most of the particles coming from outside   the chambers can be avoided by using high class clean rooms. The   particles from the ion pumps can be reduced using different pumps   which do not emit particles. The particles produced during   assembly of, for example, DIP must be suppressed by accepting   different assembling methods from the traditional ones.

  Address (URL): http://www.sciencedirect.com/science/article/pii/0042207X9290259Y