Hiroshi Saeki - Vacuum seal for rectangular flange

Document created by saeki@spring8.or on Aug 22, 2014
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  Publication Details (including relevant citation   information):

  Vacuum 85, 975 - 977 (2011).

  Keywords: Vacuum seal; Vacuum flange; Metal gasket; Ultrahigh   vacuum


  A new vacuum seal for a rectangular flange used in r.f.   equipments, was developed. The vacuum seal consists of a recess   with a flat surface, machined into a rectangular flange, a   rectangular metal gasket with a raised projection on one face,   and a mating flange with a recess and raised projection. No leak   greater than 1 × 10−10 Pa m3/s was found in   leak tests, before and after baking cycles (100 °C, 12 h).

  Address (URL): http://www.sciencedirect.com/science/article/pii/S0042207X11000170