Publication Details (including relevant citation information):
Vacuum 85, 975 - 977 (2011).
Keywords: Vacuum seal; Vacuum flange; Metal gasket; Ultrahigh vacuum
A new vacuum seal for a rectangular flange used in r.f. equipments, was developed. The vacuum seal consists of a recess with a flat surface, machined into a rectangular flange, a rectangular metal gasket with a raised projection on one face, and a mating flange with a recess and raised projection. No leak greater than 1 × 10−10 Pa m3/s was found in leak tests, before and after baking cycles (100 °C, 12 h).