Hiroshi Saeki - Fundamental functions of  a new type of leak detector using oxygen-ion conductor

Document created by saeki@spring8.or on Aug 22, 2014
Version 1Show Document
  • View in full screen mode

  Publication Details (including relevant citation   information):

  J. Vac. Sci. Technol. A 18(4), 1755 - 1757 (2000).


        07.30.Hd              Vacuum testing methods; leak detectors      
        07.30.Dz              Vacuum gauges      


  A new type of leak detector (LeakD) was developed using the   principle of selective and sensitive oxygen detection using   oxygen-ion-conducting ceramics, e.g., yttria-stabilized zirconia   (YSZ). By comparing the experimental results of the LeakD with a   quadrupole mass spectrometer (QMS) and other methods, it was   clear that (1) at a large leak, the data of LeakD coincided with   theoretical values; (2) at a small leak, the P(O2)vaccalculated from the   electromotive force (emf) of LeakD differed from the P(O2)vac of QMS, especially at higher   temperature for YSZ; (3) at a small leak, using tandem two   LeaksDs under both sensing surfaces of YSZ evacuated with any   different oxygen partial pressures about 100–10−6,P(O2)vac obtained from the emf of   LeakD nearly coincided with the theoretical values; and (4) a   leak point is found by blowing nitrogen gas on the point. The   phenomena of (2) and (3) showed that the oxygen-ion-conducting   ceramics may be especially influenced by a total pressure less   than 10−3 or 10−4 Torr. The simple and small   LeakD has good reproducibility and rapid response, and it is   assumed that it has a smaller outgassing rate compared to some   gauges with filaments. The LeakD can continuously detect a leak   in the routine installation, and also inform others of an   accident or emergency. The LeakD is a convenient and highly   sensitive leak detector compared to a traditional helium leak   detector using a QMS.

  Address (URL): http://avspublications.org/jvsta/resource/1/jvtad6/v18/i4/p1755_s1