Hiroshi Saeki - New electrostatic micromanipulator which dislodges adhered dust particles in vacuum

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  Publication Details (including relevant citation   information):

  J. Vac. Sci. Technol. B 10(6), 2491 - 2492 (1992).

  PACS:

  06.60.SxPositioning   and alignment; manipulating, remote handling

  85.40.-eMicroelectronics:   LSI, VLSI, ULSI; integrated circuit fabrication technology

  Abstract:

  Address (URL): http://avspublications.org/jvstb/resource/1/jvtbd9/v10/i6/p2491_s1

 

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