Hiroshi Saeki - New electrostatic micromanipulator which dislodges adhered dust particles in vacuum

Version 1

      Publication Details (including relevant citation   information):

      J. Vac. Sci. Technol. B 10(6), 2491 - 2492 (1992).

      PACS:

      06.60.SxPositioning   and alignment; manipulating, remote handling

      85.40.-eMicroelectronics:   LSI, VLSI, ULSI; integrated circuit fabrication technology

      Abstract:

      Address (URL): http://avspublications.org/jvstb/resource/1/jvtbd9/v10/i6/p2491_s1