Hiroshi Saeki - The durability of ballscrews for ultrahigh vacuum

Version 1

      Publication Details (including relevant citation   information):

      J. Vac. Sci. Technol. A 8(4), 3360 - 3362 (1990).

      This article is related to J. Ikeda's presentation at the 1st   International Vacuum Mechatronics Workshop, Santa Barbara,   U.S.A., 1989.


      07.30.KfVacuum   chambers, auxiliary apparatus, and materials


      A test of the durability of ballscrews was carried out. Two sets   of screws and nuts were used. The screws and nuts were made of   stainless steel. Electrochemical buffing was performed on the   surfaces of all the screws and nuts. One set, (a screw and two   nuts) was further coated with TiC and Ag, while the other set was   not coated. The stainless steel balls were coated with Ag. Each   ballscrew was directly connected to an ultrahigh‐vacuum   (UHV)‐compatible stepping motor. The test was carried out in an   UHV environment of 1010–1011 Torr. The ballscrew coated with TiC   and Ag was moved through more than 200 000 reciprocating cycles;   the uncoated ballscrew could only be moved through 1740 cycles   before failure.

      Address (URL): http://avspublications.org/jvsta/resource/1/jvtad6/v8/i4/p3360_s1