Hiroshi Saeki - New electrostatic dust collector for use in vacuum system

Version 1

      Publication Details (including relevant citation   information):

      J. Vac. Sci. Technol. A 7(3), 2512 - 2514 (1989).

      This article was presented at the 35th National Symposium of the   AVS, Atlanta, U.S.A., 1988.

      And this is also related to H. Saeki's presentation at the 1st   International Vacuum Mechtronics Workshop, Santa Barbara, U.S.A.,   1989.


      07.30.-tVacuum   apparatus


      A new active dust collector was developed for use in vacuum   systems. The dust is collected using an electrostatic force only   or using an electron beam. The dust collecting electrode is made   from copper‐clad fiberglass epoxy. The potential of the electrode   can be varied from −3 to +3 kV. The current of the electron beam   was 14 μA, and the vacuum pressure in the test chamber ranged   from 106 to 107 Torr. The dust collecting device was   tested with several conducting and nonconducting dust materials   ∼60 μm in size on substrate materials of stainless steel, Al, Cu,   Si wafers, and quartz. Dust removal was monitored using an   optical microscope with a video camera. The results show that the   new active dust collector removes 90% or more of the dust   materials from most substrates.

      Address (URL): http:///avspublications.org/jvsta/resource/1/jvtad6/v7/i3/p2512_s1