Publication Details (including relevant citation information):
J. Vac. Sci. Technol. A 8(6), 4098 - 4100 (1990).
This article was presented at the 36th National Symposium of the AVS, Boston, U.S.A., 1989.
|06.60.Sx||Positioning and alignment; manipulating, remote handling|
|07.30.Kf||Vacuum chambers, auxiliary apparatus, and materials|
|77.65.-j||Piezoelectricity and electromechanical effects|
Recently precise positioning devices with low outgassing rates have been required for production systems of very large scale integrated circuits, surface analysis systems, and scanning tunneling microscopes in ultrahigh vacuum. A bakable XYθ three‐axis positioning table using a unique positioning mechanism utilizing friction and inertial forces caused by rapid deformations of piezoelectric elements was developed. The table has a hexagonal shape of 120 mm in diameter and is mainly made of aluminum alloys with an EX‐process. The table has three feet with an Si3N4 ball on each bottom side and set on a plate made of Pyrex glass. The table was able to operate in an ultrahigh vacuum environment of the order of 10−12 Torr.