Hiroshi Saeki - Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements

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  Publication Details (including relevant citation   information):

  J. Vac. Sci. Technol. A 8(6), 4098 - 4100 (1990).

  This article was presented at the 36th National Symposium of the   AVS, Boston, U.S.A., 1989.

  PACS:

                                                                             
        06.60.Sx              Positioning and alignment; manipulating, remote handling      
        07.30.Kf              Vacuum chambers, auxiliary apparatus, and materials      
        77.65.-j              Piezoelectricity and electromechanical effects      

  Abstract:

  Recently precise positioning devices with low outgassing rates   have been required for production systems of very large scale   integrated circuits, surface analysis systems, and scanning   tunneling microscopes in ultrahigh vacuum. A bakable XYθ three‐axis   positioning table using a unique positioning mechanism utilizing   friction and inertial forces caused by rapid deformations of   piezoelectric elements was developed. The table has a hexagonal   shape of 120 mm in diameter and is mainly made of aluminum alloys   with an EX‐process. The table has three feet   with an Si3N4 ball on each bottom side and set on a   plate made of Pyrex glass. The table was able to operate in an   ultrahigh vacuum environment of the order of 1012 Torr.

  Address (URL): http://avspublications.org/jvsta/resource/1/jvtad6/v8/i6/p4098_s1

 

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