Ivan Kempson - Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm

Document created by Ivan Kempson on Aug 22, 2014
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  Publication Details (including relevant citation   information):

  TY Chen, YT Chen, CL   Wang, IM. Kempson, WK Lee, YS Chu, Y Hwu, G Margaritondo,   Full-field microimaging with 8 keV X-rays achieves a spatial   resolutions better than 20 nm, Optics Express,  19(21),19919-19924, 2011.


  Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width)   used as objective lenses in a full field transmission reached a   spatial resolution better than 20 nm and 1.5% efficiency with 8   keV photons. Zernike phase contrast was also realized without   compromising the resolution. These are very significant   achievements in the rapid progress of high-aspect-ratio zone   plate fabrication by combined electron beam lithography and   electrodeposition.

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