Peter Hsieh - DC magnetron reactive sputtering of low stress AlN piezoelectric thin films for MEMS application

Version 1

      Publication Details (including relevant citation   information):

      MRS Meeting, Materials Science of Microelectromechanical Systems   (MEMS) Devices, Boston, December 1998, A.H. Heuer and S.J. Jacobs   (eds.)

      Abstract:

      Address (URL): http://