Peter Hsieh - DC magnetron reactive sputtering of low stress AlN piezoelectric thin films for MEMS application

Document created by Peter Hsieh on Aug 22, 2014
Version 1Show Document
  • View in full screen mode

  Publication Details (including relevant citation   information):

  MRS Meeting, Materials Science of Microelectromechanical Systems   (MEMS) Devices, Boston, December 1998, A.H. Heuer and S.J. Jacobs   (eds.)

  Abstract:

  Address (URL): http://

 

Attachments

    Outcomes