Mariana Fraga - Nitrogen doping of SiC thin films deposited by RF magnetron sputtering

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      Publication Details (including relevant citation   information):

       
    •                 Mariana Amorim Fraga   
    •    
    •                 Marcos Massi   
    •    
    •           , Ivo C. Oliveira   
    •    
    •           , Homero S. Maciel   
    •    
    •           , Sebastião G. dos       Santos Filho   
    •    
    •           , Ronaldo D. Mansano    
    •  

        Nitrogen doping of SiC thin films deposited by RF magnetron   sputtering.Journal of   Materials Science: Materials in   Electronics 19   (2008), 835-840

         

      Abstract:

      Address (URL): http://link.springer.com/article/10.1007%2Fs10854-007-9487-y