Mariana Fraga - Nitrogen doping of SiC thin films deposited by RF magnetron sputtering

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  Publication Details (including relevant citation   information):

     
  •                 Mariana Amorim Fraga   
  •    
  •                 Marcos Massi   
  •    
  •           , Ivo C. Oliveira   
  •    
  •           , Homero S. Maciel   
  •    
  •           , Sebastião G. dos       Santos Filho   
  •    
  •           , Ronaldo D. Mansano    
  •  

    Nitrogen doping of SiC thin films deposited by RF magnetron   sputtering.Journal of   Materials Science: Materials in   Electronics 19   (2008), 835-840

     

  Abstract:

  Address (URL): http://link.springer.com/article/10.1007%2Fs10854-007-9487-y

 

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