Publication Details (including relevant citation information):
Mariana Amorim Fraga, Rodrigo Sávio Pessoa, Marcos Massi and Homero Santiago Maciel (2012). Applications of SiC-Based Thin Films in Electronic and MEMS Devices, Physics and Technology of Silicon Carbide Devices, Dr. Yasuto Hijikata (Ed.), ISBN: 978-953-51-0917-4, InTech, DOI: 10.5772/50998. Available from: http://www.intechopen.com/books/physics-and-technology-of-silicon-carbide-device s/applications-of-sic-based-thin-films-in-electronic-and-mems-devices
The goal of this chapter is to discuss the role of in situ incorporation of nitrogen, oxygen, aluminum, boron, phosphorus and argon on the properties of SiC films. Special attention is given to the low temperature SiC growth processes. An overview on the applications of SiC-based thin films in electronic and MEMS devices is presented and discussed. Our recent researches on heterojunction diodes and MEMS sensors are emphasized.