Mariana Fraga - Plasma-assisted techniques for growing hard nanostructured coatings: An overview

Document created by Mariana Fraga on Feb 12, 2016
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Pessoa, R.S. ; Fraga,   M.A. ; Santos,   L.V. ;   Galvão, N.K.A.M. ; Maciel, H.S. ; MASSI, M. .   Plasma-assisted techniques for growing hard nanostructured   coatings. In: Mahmood Aliofkhazraei. (Org.). Anti-Abrasive   Nanocoatings. 1ed.Cambridge: Elsevier, 2015, v. 1, p.   455-479.


    Nano-structured coatings have recently attracted increasing   interest because of the possibilities of synthesizing materials   with unique properties, such as high hardness, toughness, wear   resistance, optical transparency, making them technologically   attractive for different applications from the industrial to   biomedical. In the field of hard coatings, these materials can be   grouped in two main classes: (1) hard multilayer and (2) hard   nanocomposite coatings. The most common nano-structured coatings   employed in hardness applications are based on carbides,   nitrides, borides, and oxides of transition metals and of group   III and IV elements. These coatings are frequently synthesized by   plasma-assisted techniques due to their versatility, which   enables the tailoring of nanocoating properties, the use of a   variety of substrates, and ensures a high reproducibility of   deposition conditions. This   chapter presents an overview of the hard nanocoatings and the   main plasma-assisted techniques for their synthesis. Among these   techniques are highlighted plasma enhanced chemical vapor   deposition, atomic layer deposition, and magnetron sputtering   deposition. Characteristics of some hard coatings obtained by   these techniques are described.

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