Mostafa Moonir Shawrav - Chlorine based focused electron beam induced etching: A novel way to pattern germanium

Document created by Mostafa Moonir Shawrav on Aug 1, 2016Last modified by Mostafa Moonir Shawrav on Aug 1, 2016
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  Publication Details (including relevant citation   information):

  Shawrav, M.M., Gökdeniz, Z.G., Wanzenboeck, H.D., Taus, P., Mika,   J.K., Waid, S., Bertagnolli, E. 42 170-173

  Abstract:

  No abstract available.

  Address (URL): http://www.sciencedirect.com/science/article/pii/S1369800115301633

 

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