Mostafa Moonir Shawrav - Chlorine based focused electron beam induced etching: A novel way to pattern germanium

Version 2

      Publication Details (including relevant citation   information):

      Shawrav, M.M., Gökdeniz, Z.G., Wanzenboeck, H.D., Taus, P., Mika,   J.K., Waid, S., Bertagnolli, E. 42 170-173

      Abstract:

      No abstract available.

      Address (URL): http://www.sciencedirect.com/science/article/pii/S1369800115301633